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Modeling and Simulation of Thin-Film Processing: Volume 389

Language EnglishEnglish
Book Hardback
Book Modeling and Simulation of Thin-Film Processing: Volume 389 Michael J. FlussRobert J. KeeDavid SrolovitzCynthia A. Volkert
Libristo code: 02060052
Publishers Materials Research Society, October 1995
A diverse set of materials science communities come together in this volume to review the extraordin... Full description
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A diverse set of materials science communities come together in this volume to review the extraordinary progress made in the development of computer simulation and modeling techniques for the prediction of film morphology, microstructure, composition, profile and structure. These techniques are rapidly moving out of the area of academic research and into technological and production design areas of thin-film-based industries. The book is loosely organized in ascending order of modeling-length scales - from atomic, up to the entire deposition reactor. Topics include: deposition and growth modeling; film morphology and topology; film microstructure; failure mechanisms; etching; process modeling and control and reactor-scale modeling.

About the book

Full name Modeling and Simulation of Thin-Film Processing: Volume 389
Author Michael J. FlussRobert J. KeeDavid SrolovitzCynthia A. Volkert
Language English
Binding Book - Hardback
Date of issue 1995
Number of pages 382
EAN 9781558992924
ISBN 1558992928
Libristo code 02060052
Publishers Materials Research Society
Weight 705
Dimensions 160 x 234 x 25

Categories

Technology, Engineering, Agriculture > Electronics & communications engineering > Electronics engineering > Electronic devices & materials
Technology, Engineering, Agriculture > Mechanical engineering & materials > Materials science
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