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Defect Recognition and Image Processing in Semiconductors 1997
Language
English
English
Book
Hardback
Presents an overview of techniques used to assess, monitor, and characterize defects from the atomic...
Full description
Libristo code: 06681091
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1461 b
1461 b
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Presents an overview of techniques used to assess, monitor, and characterize defects from the atomic scale to inhomogeneities in complete silicon wafers. This book addresses advances in defect analyzing techniques and instrumentation and their application to substrates, epilayers, and devices. It investigates defects in layers and devices.
About the book
Full name
Defect Recognition and Image Processing in Semiconductors 1997
Author
I. Rechenberg
Language
English
English
Binding
Book - Hardback
Date of issue
1998
Number of pages
524
EAN
9780750305006
ISBN
9780750305006
Libristo code
06681091
Publishers
Taylor & Francis Ltd
Weight
1170
Dimensions
156 x 234 x 30
