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Chemical Vapor Deposition Polymerization

Language EnglishEnglish
Book Hardback
Book Chemical Vapor Deposition Polymerization Jeffrey B. Fortin
Libristo code: 05256398
Publishers Springer, Berlin, November 2002
Chemical Vapor Deposition Polymerization - The Growth and Properties of Parylene Thin Films is inten... Full description
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Chemical Vapor Deposition Polymerization - The Growth and Properties of Parylene Thin Films is intended to be valuable to both users and researchers of parylene thin films. It should be particularly useful for those setting up and characterizing their first research deposition system. It provides a good picture of the deposition process and equipment, as well as information on system-to-system variations that is important to consider when designing a deposition system or making modifications to an existing one. Also included are methods to characterizae a deposition system's pumping properties as well as monitor the deposition process via mass spectrometry. There are many references that will lead the reader to further information on the topic being discussed. This text should serve as a useful reference source and handbook for scientists and engineers interested in depositing high quality parylene thin films.

About the book

Full name Chemical Vapor Deposition Polymerization
Language English
Binding Book - Hardback
Date of issue 2003
Number of pages 102
EAN 9781402076886
ISBN 1402076886
Libristo code 05256398
Publishers Springer, Berlin
Weight 354
Dimensions 155 x 235 x 7
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