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Written by an expert in the field, and based on over 25 years of teaching experience in this subject, Electronic Material Science&Surfaces, Interfaces, and Thin Films for Microelectronics Set discusses the field of materials science and the fact that it is predicated on the understanding of why materials behave the way they do, and encompasses how new materials are developed and processed. Here, readers will discover full coverage of surfaces, interfaces, and film fundamentals for microelectronics, as well as the physics and chemistry of microelectronics processing.